Patent Assignment
Reel/Frame 021600/0007
Assignment of Assignor's Interest
Recorded: 2008-09-29
Pages: 4
Assignors
OHNUMA, HIDETO
Executed: 2008-09-12
IIKUBO, YOICHI
Executed: 2008-09-12
YAMAZAKI, SHUNPEI
Executed: 2008-09-18
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device