Patent Assignment
Reel/Frame 021615/0408
Assignment of Assignor's Interest
Recorded: 2008-10-01
Pages: 5
Assignors
DEGUENTHER, MARKUS
Executed: 2008-09-05
LAYH, MICHAEL
Executed: 2008-08-29
GERHARD, MICHAEL
Executed: 2008-09-01
THOME, BRUNO
Executed: 2008-09-09
SINGER, WOLFGANG
Executed: 2008-08-27
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Illumination System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.