Patent Assignment
Reel/Frame 021625/0478
Assignment of Assignor's Interest
Recorded: 2008-10-02
Pages: 6
Assignors
PATALAY, KAILASH KIRAN
Executed: 2008-09-16
VATUS, JEAN R.
Executed: 2008-09-16
BERLIN, DEAN
Executed: 2008-10-01
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Apparatus for Improved Azimuthal Thermal Uniformity of a Substrate