Patent Assignment
Reel/Frame 021634/0037
Assignment of Assignor's Interest
Recorded: 2008-10-03
Pages: 4
Assignors
YUASA, KAZUHIRO
Executed: 2008-09-16
KIMURA, KAZUHIRO
Executed: 2008-09-16
MEGAWA, YASUHIRO
Executed: 2008-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Device for Processing Substrate and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.