Patent Assignment
Reel/Frame 021635/0472
Assignment of Assignor's Interest
Recorded: 2008-10-06
Pages: 3
Assignors
HATAKEYAMA, JUN
Executed: 2008-08-19
HASEGAWA, KOJI
Executed: 2008-08-19
WATANABE, TAKERU
Executed: 2008-08-19
HARADA, YUJI
Executed: 2008-08-19
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process