Patent Assignment
Reel/Frame 021641/0604
Assignment of Assignor's Interest
Recorded: 2008-10-07
Pages: 8
Assignors
WOLF, OLIVER
Executed: 2008-08-26
SIEKMANN, HEIKO
Executed: 2008-09-23
KALCHBRENNER, EVA
Executed: 2008-09-08
RENNON, SIEGFRIED
Executed: 2008-09-18
WANGLER, JOHANNES
Executed: 2008-09-16
BRESAN, ANDRE
Executed: 2008-09-18
GERHARD, MICHAEL
Executed: 2008-09-01
HAVERKAMP, NILS
Executed: 2008-09-04
SCHOLZ, AXEL
Executed: 2008-09-17
SCHARNWEBER, RALF
Executed: 2008-09-01
LAYH, MICHAEL
Executed: 2008-08-25
BURKART, STEFAN
Executed: 2008-09-17
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Integrator for an Illumination System of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.