Patent Assignment
Reel/Frame 021642/0275
Assignment of Assignor's Interest
Recorded: 2008-10-07
Pages: 8
Assignors
WANGLER, JOHANNES
Executed: 2008-09-16
SIEKMANN, HEIKO
Executed: 2008-09-23
WEIBLE, KENNETH
Executed: 2008-09-03
SCHARNWEBER, RALF
Executed: 2008-09-01
MAUL, MANFRED
Executed: 2008-08-29
DEGUENTHER, MARKUS
Executed: 2008-09-05
LAYH, MICHAEL
Executed: 2008-08-25
SCHOLZ, AXEL
Executed: 2008-09-17
SPENGLER, UWE
Executed: 2008-09-10
VOELKEL, REINHARD
Executed: 2008-09-06
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.