Patent Assignment
Reel/Frame 021647/0214
Assignment of Assignor's Interest
Recorded: 2008-10-08
Pages: 3
Assignor
XU, ZHI
Executed: 2008-10-07
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Dopant Activation Anneal to Achieve Less Dopant Diffusion (Better Usj Profile) and Higher Activation Percentage