Patent Assignment
Reel/Frame 021655/0027
Assignment of Assignor's Interest
Recorded: 2008-09-24
Pages: 3
Assignor
DHINDSA, RAJINDER
Executed: 2008-08-23
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Temperature Control Modules for Showerhead Electrode Assemblies for Plasma Processing Apparatuses