Patent Assignment
Reel/Frame 021656/0046
Assignment of Assignor's Interest
Recorded: 2008-09-23
Pages: 3
Assignors
INOUE, HISASHI
Executed: 2008-08-04
MATSUMOTO, SHUNICHI
Executed: 2008-07-29
TAKEUCHI, YASUSHI
Executed: 2008-07-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Heat Treatment Method Wherein the Substrate Holder Is Composed of Two Holder Constituting Bodies That Move Relative to Each Other