Patent Assignment
Reel/Frame 021664/0168
Assignment of Assignor's Interest
Recorded: 2008-10-10
Pages: 3
Assignee
CARL ZEISS SMT INC.
ONE CORPORATION WAY, PEABODY, MASSACHUSETTS, 01960
Covered Property
(1)
Aligning Charged Particle Beams
Application:
61/101,197 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.