Patent Assignment
Reel/Frame 021667/0864
Assignment of Assignor's Interest
Recorded: 2008-10-10
Pages: 6
Assignors
PAZIDIS, ALEXANDRA
Executed: 2008-06-23
ZACZEK, CHRISTOPH
Executed: 2008-06-13
HIRNET, ALEXANDER
Executed: 2008-06-09
FINK, HERBERT
Executed: 2008-09-11
SCHMEREK, DIETER
Executed: 2008-06-12
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method of Processing an Optical Element and an Optical Element, in Particular for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.