Patent Assignment
Reel/Frame 021683/0389
Assignment of Assignor's Interest
Recorded: 2008-10-15
Pages: 3
Assignors
YAMAMOTO, TARO
Executed: 2008-10-06
FUNAKOSHI, HIDEO
Executed: 2008-10-06
INATOMI, YUICHIRO
Executed: 2008-10-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus