Patent Assignment
Reel/Frame 021683/0611
Assignment of Assignor's Interest
Recorded: 2008-10-15
Pages: 4
Assignors
TANAKA, SATOSHI
Executed: 2008-02-26
KOSHIMIZU, CHISHIO
Executed: 2008-02-26
IWATA, MANABU
Executed: 2008-02-26
MATSUMOTO, NAOKI
Executed: 2008-03-03
ITO, TORU
Executed: 2008-03-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method of Plasma Distribution Correction