Patent Assignment
Reel/Frame 021698/0955
Assignment of Assignor's Interest
Recorded: 2008-10-17
Pages: 4
Assignors
ZHANG, CHUNLEI
Executed: 2008-10-17
FOVELL, RICHARD
Executed: 2008-10-17
GOLD, EZRA ROBERT
Executed: 2008-10-17
BALAKRISHNA, AJIT
Executed: 2008-10-17
CRUSE, JAMES P.
Executed: 2008-10-17
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Methods and Apparatus for Rapidly Responsive Heat Control in Plasma Processing Devices