Patent Assignment
Reel/Frame 021707/0694
Assignment of Assignor's Interest
Recorded: 2008-10-20
Pages: 5
Assignors
KOROBOCHKO, VLADIMIR, DR.
Executed: 2008-10-17
KLEINSCHMIDT, JUERGEN, DR.
Executed: 2008-10-17
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, JENA, 07745, GERMANY
Covered Property
(1)
Arrangement for Generating Euv Radiation
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Assignment to Correct the Address of Assignee Previously Recorded on Reel 021707 Frame 0694. Assignor(S) Hereby Confirms the Change of Assignee's Address.
Oct 7, 2011
From: XTREME TECHNOLOGIES GMBH
To: XTREME TECHNOLOGIES GMBH
Reel/Frame 027029/0393 →
Assignment of Assignor's Interest
Jan 17, 2014
From: XTREME TECHNOLOGIES GMBH
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 032086/0615 →