Patent Assignment
Reel/Frame 021712/0901
Assignment of Assignor's Interest
Recorded: 2008-10-21
Pages: 5
Assignors
NITSCH, ALOIS
Executed: 2008-08-21
TILGNER, RAINER
Executed: 2008-09-11
BAUMEISTER, HORST
Executed: 2008-08-21
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-12, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Method and Apparatus for Detecting a Crack in a Semiconductor Wafer, and a Wafer Chuck