Patent Assignment
Reel/Frame 021739/0285
Assignment of Assignor's Interest
Recorded: 2008-10-10
Pages: 3
Assignors
TAKAHASHI, TARO
Executed: 2008-09-25
KOBAYASHI, YOICHI
Executed: 2008-09-25
OHTA, SHINROU
Executed: 2008-09-25
OGAWA, AKIHIKO
Executed: 2008-09-25
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing monitoring method, polishing apparatus and monitoring apparatus