Patent Assignment
Reel/Frame 021740/0313
Assignment of Assignor's Interest
Recorded: 2008-10-27
Pages: 4
Assignors
OSSMANN, JENS
Executed: 2008-10-15
ENDRES, MARTIN
Executed: 2008-10-17
STUETZLE, RALF
Executed: 2008-10-17
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Optical System for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.