Patent Assignment
Reel/Frame 021740/0373
Assignment of Assignor's Interest
Recorded: 2008-10-27
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System for Euv Lithography
Application:
12/235,277 →
Publication:
US 2009/0041182
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.