Patent Assignment
Reel/Frame 021749/0508
Assignment of Assignor's Interest
Recorded: 2008-10-28
Pages: 6
Assignors
TOTZECK, MICHAEL
Executed: 2008-10-17
GOEHNERMEIER, AKSEL
Executed: 2008-09-30
SINGER, WOLFGANG
Executed: 2008-09-29
BEIERL, HELMUT
Executed: 2008-09-26
FELDMANN, HEIKO
Executed: 2008-10-13
MANN, HANS-JUERGEN
Executed: 2008-10-02
HETZLER, JOCHEN
Executed: 2008-09-29
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.