Patent Assignment
Reel/Frame 021771/0289
Assignment of Assignor's Interest
Recorded: 2008-10-31
Pages: 4
Assignors
TU, WEN-CHIANG
Executed: 2008-10-31
WANG, YOU
Executed: 2008-10-30
WANG, YUCHUN
Executed: 2008-10-30
KARUPPIAH, LAKSHMANAN
Executed: 2008-10-30
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Dishing and Defect Control of Chemical Mechanical Polishing Using Real-Time Adjustable Additive Delivery