Assignment of Assignor's Interest

Recorded: 2008-11-05 Pages: 2

Assignors

KRAUS, DIETER

Executed: 2008-09-10

EHM, DIRK HEINRICH

Executed: 2008-09-10

SCHMIDT, STEFAN-WOLFGANG

Executed: 2008-09-22

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Euv Lithography Apparatus and Method for Determining the Contamination Status of an Euv-Reflective Optical Surface

Patent: 8,054,446 →

Application: 12/196,075 →

Publication: US 2010/0045948

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.