Patent Assignment
Reel/Frame 021795/0891
Assignment of Assignor's Interest
Recorded: 2008-11-06
Pages: 2
Assignors
UENO, MASAAKI
Executed: 2008-10-20
HAYASHIDA, AKIRA
Executed: 2008-10-20
SHIMADA, MASAKAZU
Executed: 2008-10-21
OKA, TAKENORI
Executed: 2008-10-11
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU,, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.