Patent Assignment
Reel/Frame 021839/0262
Assignment of Assignor's Interest
Recorded: 2008-11-14
Pages: 8
Assignors
CHEN, FENG
Executed: 2008-11-05
HUMAYUN, RAASHINA
Executed: 2008-11-10
MANOHAR, ABHISHEK
Executed: 2008-11-05
Assignee
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method for Reducing Tungsten Roughness and Improving Reflectivity