Patent Assignment
Reel/Frame 021839/0374
Assignment of Assignor's Interest
Recorded: 2008-11-14
Pages: 6
Assignors
FARR, JON
Executed: 2008-09-23
PAMARTHY, SHARMA
Executed: 2008-09-10
SIRAJUDDIN, KHALID
Executed: 2008-09-10
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Post etch reactive plasma milling to smooth through substrate via sidewalls and other deeply etched features