Patent Assignment
Reel/Frame 021856/0936
Assignment of Assignor's Interest
Recorded: 2008-10-31
Pages: 3
Assignors
DHINDSA, RAJINDER
Executed: 2008-10-28
POVOLNY, HENRY
Executed: 2008-10-28
ANTOLIK, JERRY K.
Executed: 2008-10-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Temperature Control Module Using Gas Pressure to Control Thermal Conductance Between Liquid Coolant and Component Body