Patent Assignment
Reel/Frame 021886/0075
Assignment of Assignor's Interest
Recorded: 2008-11-25
Pages: 3
Assignor
SCHRANK, FRANZ
Executed: 2008-11-04
Assignee
AUSTRIAMICROSYSTEMS AG
SCHLOSS PREMSTATTEN, UNTERPREMSTATTEN, 8141, AUSTRIA
Covered Property
(1)
Mems Sensor Comprising a Deformation-Free Back Electrode