Patent Assignment
Reel/Frame 021894/0821
Assignment of Assignor's Interest
Recorded: 2008-11-26
Pages: 3
Assignors
EHM, DIRK HEINRICH
Executed: 2008-11-10
SCHMIDT, STEFAN
Executed: 2008-10-11
KRAUS, DIETER
Executed: 2008-10-27
WIESNER, STEFAN
Executed: 2008-11-10
KOEHLER, STEFAN
Executed: 2008-11-12
CZAP, ALMUT
Executed: 2008-10-28
CHUNG, HIN YIU ANTHONY
Executed: 2008-11-13
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and System for Removing Contaminants from a Surface
Application:
12/234,447 →
Publication:
US 2010/0071720
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.