Patent Assignment
Reel/Frame 021899/0018
Assignment of Assignor's Interest
Recorded: 2008-11-28
Pages: 3
Assignor
MASUDA, NORIIKI
Executed: 2008-11-12
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Supply Device, Substrate Processing Apparatus and Substrate Processing Method