Patent Assignment
Reel/Frame 021909/0169
Assignment of Assignor's Interest
Recorded: 2008-12-01
Pages: 4
Assignors
MAEDA, KIYOHIKO
Executed: 2008-10-14
HANASHIMA, TAKEO
Executed: 2008-10-30
OSANAI, MASANAO
Executed: 2008-11-05
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Manufacturing Method of Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.