Patent Assignment
Reel/Frame 021911/0529
Assignment of Assignor's Interest
Recorded: 2008-12-02
Pages: 3
Assignors
OGIHARA, TSUTOMU
Executed: 2008-10-20
UEDA, TAKAFUMI
Executed: 2008-10-20
YANO, TOSHIHARU
Executed: 2008-10-20
NAKASHIMA, MUTSUO
Executed: 2008-10-20
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Metal Oxide-Containing Film-Forming Composition, Metal Oxide-Containing Film, Metal Oxide-Containing Film-Bearing Substrate, and Patterning Method