Patent Assignment
Reel/Frame 021917/0949
Assignment of Assignor's Interest
Recorded: 2008-11-19
Pages: 3
Assignors
OHTA, SHINROU
Executed: 2008-10-30
SHIMIZU, NOBURU
Executed: 2008-10-30
KOBAYASHI, YOICHI
Executed: 2008-10-30
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method