Patent Assignment
Reel/Frame 021929/0954
Assignment of Assignor's Interest
Recorded: 2008-12-04
Pages: 6
Assignors
JONCKHEERE, RIK
Executed: 2008-10-27
GOETHALS, ANNE-MARIE
Executed: 2008-10-27
LORUSSO, GIAN FRANCESCO
Executed: 2008-11-03
POLLENTIER, IVAN
Executed: 2008-10-27
Assignee
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW (IMEC)
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Detection of Contamination in Euv Systems
Application:
12/236,446 →
Publication:
US 2009/0103069
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.