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App. No. 12/236,446 · Confirmation No. 7901

DETECTION OF CONTAMINATION IN EUV SYSTEMS

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2011-11-21 ABN Abandonment 2 View
2011-10-26 XT/ Extension of Time 2 View
2011-10-26 WFEE Fee Worksheet (SB06) 2 View
2011-10-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-04-26 CTNF Non-Final Rejection 22 View
2011-04-26 892 List of references cited by examiner 1 View
2011-04-26 SRFW Search information including classification, databases and other search related notes 1 View
2011-04-26 BIB Bibliographic Data Sheet 1 View
2011-04-26 SRNT Examiner's search strategy and results 11 View
2011-04-26 1449 List of References cited by applicant and considered by examiner 1 View
2011-04-19 SRNT Examiner's search strategy and results 1 View
2011-04-19 SRNT Examiner's search strategy and results 1 View
2011-03-16 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2011-03-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-03-16 TRAN.LET Transmittal Letter 1 View
2009-04-23 NTC.PUB Notice of Publication 1 View
2008-12-10 APP.FILE.REC Filing Receipt 3 View
2008-12-10 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-12-03 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2008-12-03 OATH Oath or Declaration filed 5 View
2008-12-03 PA.. Power of Attorney 2 View
2008-12-03 R3.73 Assignee showing of ownership per 37 CFR 3.73 6 View
2008-12-03 DRW.NONBW Drawings-other than black and white line drawings 28 View
2008-12-03 WFEE Fee Worksheet (SB06) 2 View
2008-12-03 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-12-03 136A Authorization for Extension of Time all replies 3 View
2008-12-03 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2008-10-30 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 56 View
2008-10-03 NTC.MISS.PRT Notice to File Missing Parts 2 View
2008-10-03 APP.FILE.REC Filing Receipt 3 View
2008-09-24 PD.REQ.RETR Request for USPTO to retrieve priority docs 2 View
2008-09-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-09-23 ADS Application Data Sheet 5 View
2008-09-23 SPEC Specification 30 View
2008-09-23 CLM Claims 4 View
2008-09-23 ABST Abstract 1 View
2008-09-23 DRW.NONBW Drawings-other than black and white line drawings 17 View
2008-09-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-09-23 WFEE Fee Worksheet (SB06) 1 View
2008-09-23 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
12/236,446
Filed
2008-09-23
Pub. No.
US20090103069A1
Art Unit
2882