Patent Assignment
Reel/Frame 021961/0027
Assignment of Assignor's Interest
Recorded: 2008-12-11
Pages: 5
Assignors
SCHOLZ, AXEL
Executed: 2008-05-08
WEISS, MARKUS
Executed: 2008-05-30
MAUL, MANFRED
Executed: 2008-03-05
BOSSELMANN, PHILIPP
Executed: 2008-06-06
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Euv Illumination System with a System for Measuring Fluctuations of the Light Source
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.