Patent Assignment
Reel/Frame 021969/0966
Assignment of Assignor's Interest
Recorded: 2008-12-03
Pages: 3
Assignor
MATSUURA, HIROYUKI
Executed: 2008-10-30
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Treatment Apparatus, Treatment Method, and Storage Medium