Patent Assignment
Reel/Frame 021970/0641
Assignment of Assignor's Interest
Recorded: 2008-12-12
Pages: 3
Assignee
SONY CORPORATION
1-7-1 KONAN, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Dry Etching Equipment and Method for Producing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.