Patent Assignment
Reel/Frame 022007/0478
Assignment of Assignor's Interest
Recorded: 2008-12-19
Pages: 2
Assignor
TANITSU, OSAMU
Executed: 2008-10-10
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Optical Unit, Illumination Optical Apparatus, Exposure Apparatus, and Device Manufacturing Method