Patent Assignment
Reel/Frame 022007/0649
Assignment of Assignor's Interest
Recorded: 2008-12-19
Pages: 2
Assignor
WEGMANN, ULRICH
Executed: 2006-10-18
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for the Optical Measurement of an Optical System, Measurement Structure Support, and Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.