Patent Assignment
Reel/Frame 022013/0837
Assignment of Assignor's Interest
Recorded: 2008-12-18
Pages: 3
Assignors
FUKAZAWA, ATSUKI
Executed: 2008-12-16
TAZAWA, HISASHI
Executed: 2008-12-16
ONIZAWA, SHIGEYUKI
Executed: 2008-12-16
Assignee
ASM JAPAN K.K.
23-1, 6-CHROME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method for Forming Low-Carbon Cvd Film for Filling Trenches