Patent Assignment
Reel/Frame 022017/0001
Assignment of Assignor's Interest
Recorded: 2008-12-22
Pages: 3
Assignor
KOMATSU, TOMOHITO
Executed: 2008-05-01
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table Structure and Heat Treatment Apparatus