Patent Assignment
Reel/Frame 022026/0071
Assignment of Assignor's Interest
Recorded: 2008-12-24
Pages: 3
Assignor
SUKEGAWA, TAKASHI
Executed: 2008-11-05
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Scanning Exposure Apparatus and Method of Manufacturing Device