Patent Assignment
Reel/Frame 022050/0008
Assignment of Assignor's Interest
Recorded: 2009-01-02
Pages: 6
Assignors
STAMMLER, THOMAS
Executed: 2005-12-23
WAGNER, CHRISTIAN
Executed: 2005-12-25
REISINGER, GERD
Executed: 2005-11-27
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Optical System and Method for Improving Imaging Properties Thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.