Patent Assignment
Reel/Frame 022079/0772
Assignment of Assignor's Interest
Recorded: 2009-01-08
Pages: 3
Assignors
ADEL, MICHAEL
Executed: 2009-01-08
MANASSEN, AMNON
Executed: 2009-01-08
KANDEL, DANIEL
Executed: 2009-01-08
Assignee
KLA-TENCOR CORPORATION
160 RIO ROBLES, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Scatterometry Metrology Target Design Optimization