Patent Assignment
Reel/Frame 022104/0784
Assignment of Assignor's Interest
Recorded: 2009-01-14
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing a Semiconductor Substrate by Laser Irradiation