Patent Assignment
Reel/Frame 022106/0942
Assignment of Assignor's Interest
Recorded: 2009-01-14
Pages: 2
Assignor
ZIN, KELVIN KYAW
Executed: 2009-01-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of etching a thin film using pressure modulation