Patent Assignment
Reel/Frame 022116/0800
Assignment of Assignor's Interest
Recorded: 2009-01-16
Pages: 2
Assignors
IWASAKI, MAYUKA
Executed: 2008-12-24
SHISHIDO, CHIE
Executed: 2008-12-24
TANAKA, MAKI
Executed: 2008-12-25
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU,, TOKYO, JAPAN
Covered Property
(1)
Electron Microscope System and Method for Evaluating Film Thickness Reduction of Resist Patterns
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.