Assignment of Assignor's Interest

Recorded: 2009-01-22 Pages: 2

Assignor

FIOLKA, DAMIAN

Executed: 2009-01-09

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System of a Microlithographic Projection Exposure Apparatus

Application: 12/272,297 →

Publication: US 2009/0115991

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.