Patent Assignment
Reel/Frame 022147/0618
Assignment of Assignor's Interest
Recorded: 2009-01-23
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table Structure and Heat Treatment Apparatus